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LCDU and placement improvement of contacts using EUV templated DSA

dc.contributor.authorBoeckx, Carolien
dc.contributor.authorDoise, Jan
dc.contributor.authorChan, BT
dc.contributor.authorLorusso, Gian
dc.contributor.authorSutani, Takumichi
dc.contributor.authorKoshihara, Shunsuke
dc.contributor.authorIshimoto, Toru
dc.contributor.authorKato, Takeshi
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2021-10-25T16:47:43Z
dc.date.available2021-10-25T16:47:43Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30271
dc.sourceIIOimport
dc.titleLCDU and placement improvement of contacts using EUV templated DSA
dc.typeOral presentation
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceSPIE 2018
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose USA
imec.availabilityPublished - imec


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