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Laser-assisted atom probe tomography of semiconductors: the impact of the focused-ion beam specimen preparation

dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorKumar, Arul
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorGilbert, Matthieu
dc.contributor.authorHouard, Jonathan
dc.contributor.authorVella, Angela
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T16:49:10Z
dc.date.available2021-10-25T16:49:10Z
dc.date.issued2018
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30281
dc.sourceIIOimport
dc.titleLaser-assisted atom probe tomography of semiconductors: the impact of the focused-ion beam specimen preparation
dc.typeJournal article
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.source.peerreviewyes
dc.source.beginpage19
dc.source.endpage23
dc.source.journalUltramicroscopy
dc.source.volume188
dc.identifier.urlhttps://www.sciencedirect.com/science/article/pii/S0304399117304217
imec.availabilityPublished - imec


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