Authors

Bogdanowicz, Janusz; Kumar, Arul; Fleischmann, Claudia; Gilbert, Matthieu; Houard, Jonathan; Vella, Angela; Vandervorst, Wilfried

ISSN

0304-3991

Journal

Ultramicroscopy

Volume

188

Title

Laser-assisted atom probe tomography of semiconductors: the impact of the focused-ion beam specimen preparation

Publication type

Journal article