Laser-assisted atom probe tomography of semiconductors: the impact of the focused-ion beam specimen preparation

dc.contributor.author	Bogdanowicz, Janusz
dc.contributor.author	Kumar, Arul
dc.contributor.author	Fleischmann, Claudia
dc.contributor.author	Gilbert, Matthieu
dc.contributor.author	Houard, Jonathan
dc.contributor.author	Vella, Angela
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Bogdanowicz, Janusz
dc.contributor.imecauthor	Fleischmann, Claudia
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Bogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimec	Fleischmann, Claudia::0000-0003-1531-6916
dc.date.accessioned	2021-10-25T16:49:10Z
dc.date.available	2021-10-25T16:49:10Z
dc.date.issued	2018
dc.identifier.issn	0304-3991
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/30281
dc.identifier.url	https://www.sciencedirect.com/science/article/pii/S0304399117304217
dc.source.beginpage	19
dc.source.endpage	23
dc.source.journal	Ultramicroscopy
dc.source.volume	188
dc.title	Laser-assisted atom probe tomography of semiconductors: the impact of the focused-ion beam specimen preparation
dc.type	Journal article
dspace.entity.type	Publication
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