Show simple item record

Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations

dc.contributor.authorBury, Erik
dc.contributor.authorKaczer, Ben
dc.contributor.authorVan Beek, Simon
dc.contributor.authorLinten, Dimitri
dc.date.accessioned2021-10-25T16:59:21Z
dc.date.available2021-10-25T16:59:21Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30342
dc.sourceIIOimport
dc.titleExperimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations
dc.typeProceedings paper
dc.contributor.imecauthorBury, Erik
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorVan Beek, Simon
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.orcidimecBury, Erik::0000-0002-5847-3949
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecVan Beek, Simon::0000-0002-2499-4172
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage186
dc.source.endpage189
dc.source.conference48th European Solid-Statr Device Research Conference - ESSDERC
dc.source.conferencedate3/09/2018
dc.source.conferencelocationDresden Germany
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8486872
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
38712.pdf
Size:
1.922Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record