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Mechanisms of high-pressure tip-induced material removal toward a tomographic AFM

dc.contributor.authorCelano, Umberto
dc.contributor.authorPandey, Komal
dc.contributor.authorWouters, Lennaert
dc.contributor.authorParedis, Kristof
dc.contributor.authorvan der Heide, Paul
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T17:06:13Z
dc.date.available2021-10-25T17:06:13Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30376
dc.sourceIIOimport
dc.titleMechanisms of high-pressure tip-induced material removal toward a tomographic AFM
dc.typeMeeting abstract
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorPandey, Komal
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorvan der Heide, Paul
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecvan der Heide, Paul::0000-0001-6292-0329
dc.source.peerreviewno
dc.source.beginpageCM01.09.02
dc.source.conferenceMaterials Research Society Spring Meeting 2018
dc.source.conferencedate2/04/2018
dc.source.conferencelocationPhoenix, AZ USA
dc.identifier.urlhttps://mrsspring2018.zerista.com/event/member/467955
imec.availabilityPublished - imec


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