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ESD diodes in next generation bulk FinFET and GAA NW technology nodes

dc.contributor.authorChen, Shih-Hung
dc.contributor.authorHellings, Geert
dc.contributor.authorLinten, Dimitri
dc.contributor.authorMertens, Hans
dc.contributor.authorChiarella, Thomas
dc.contributor.authorMitard, Jerome
dc.contributor.authorMocuta, Anda
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-25T17:11:54Z
dc.date.available2021-10-25T17:11:54Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30403
dc.sourceIIOimport
dc.titleESD diodes in next generation bulk FinFET and GAA NW technology nodes
dc.typeProceedings paper
dc.contributor.imecauthorChen, Shih-Hung
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.conference2018 RCJ EOS/ESD/EMC Symposium
dc.source.conferencedate27/11/2018
dc.source.conferencelocationTokyo Japan
dc.identifier.urlhttp://rcj.or.jp/wordpress/wp-content/uploads/2018-28th-RCJ-Symposium-program-20180920.pdf
imec.availabilityPublished - imec


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