dc.contributor.author | Chew, Soon Aik | |
dc.contributor.author | Demuynck, Steven | |
dc.contributor.author | Zhang, Liping | |
dc.contributor.author | Pacco, Antoine | |
dc.contributor.author | Devriendt, Katia | |
dc.contributor.author | Teugels, Lieve | |
dc.contributor.author | Hopf, Toby | |
dc.contributor.author | Versluijs, Janko | |
dc.contributor.author | Vrancken, Christa | |
dc.contributor.author | Dangol, Anish | |
dc.contributor.author | Altamirano Sanchez, Efrain | |
dc.contributor.author | Mocuta, Dan | |
dc.contributor.author | Horiguchi, Naoto | |
dc.date.accessioned | 2021-10-25T17:13:13Z | |
dc.date.available | 2021-10-25T17:13:13Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30409 | |
dc.source | IIOimport | |
dc.title | Replacement metal contact using sacrificial ILD0 for wrap around contact in scaled FinFET technology | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Demuynck, Steven | |
dc.contributor.imecauthor | Zhang, Liping | |
dc.contributor.imecauthor | Pacco, Antoine | |
dc.contributor.imecauthor | Devriendt, Katia | |
dc.contributor.imecauthor | Teugels, Lieve | |
dc.contributor.imecauthor | Hopf, Toby | |
dc.contributor.imecauthor | Versluijs, Janko | |
dc.contributor.imecauthor | Vrancken, Christa | |
dc.contributor.imecauthor | Dangol, Anish | |
dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
dc.contributor.imecauthor | Horiguchi, Naoto | |
dc.contributor.orcidimec | Devriendt, Katia::0000-0002-0662-7926 | |
dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
dc.contributor.orcidimec | Horiguchi, Naoto::0000-0001-5490-0416 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 33 | |
dc.source.endpage | 35 | |
dc.source.conference | IEEE International Interconnect Technology Conference - IITC | |
dc.source.conferencedate | 4/06/2018 | |
dc.source.conferencelocation | Santa Clara, CA USA | |
dc.identifier.url | https://ieeexplore.ieee.org/document/8430457/ | |
imec.availability | Published - open access | |