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dc.contributor.authorCiofi, Ivan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorBaert, Rogier
dc.contributor.authorContino, Antonino
dc.contributor.authorGupta, Anshul
dc.contributor.authorCroes, Kristof
dc.contributor.authorWilson, Chris
dc.contributor.authorMocuta, Dan
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-25T17:17:42Z
dc.date.available2021-10-25T17:17:42Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30427
dc.sourceIIOimport
dc.titleRC modeling, scaling trends and mitigation approaches
dc.typeProceedings paper
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage033DII
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate18/03/2018
dc.source.conferencelocationMilano Italy
dc.identifier.urlhttp://mam2018.mdm.imm.cnr.it/MAM2018.pdf
imec.availabilityPublished - open access


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