dc.contributor.author | Ciofi, Ivan | |
dc.contributor.author | Roussel, Philippe | |
dc.contributor.author | Baert, Rogier | |
dc.contributor.author | Contino, Antonino | |
dc.contributor.author | Gupta, Anshul | |
dc.contributor.author | Croes, Kristof | |
dc.contributor.author | Wilson, Chris | |
dc.contributor.author | Mocuta, Dan | |
dc.contributor.author | Tokei, Zsolt | |
dc.date.accessioned | 2021-10-25T17:17:42Z | |
dc.date.available | 2021-10-25T17:17:42Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30427 | |
dc.source | IIOimport | |
dc.title | RC modeling, scaling trends and mitigation approaches | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Ciofi, Ivan | |
dc.contributor.imecauthor | Roussel, Philippe | |
dc.contributor.imecauthor | Baert, Rogier | |
dc.contributor.imecauthor | Contino, Antonino | |
dc.contributor.imecauthor | Gupta, Anshul | |
dc.contributor.imecauthor | Croes, Kristof | |
dc.contributor.imecauthor | Wilson, Chris | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.orcidimec | Ciofi, Ivan::0000-0003-1374-4116 | |
dc.contributor.orcidimec | Roussel, Philippe::0000-0002-0402-8225 | |
dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 033DII | |
dc.source.conference | Materials for Advanced Metallization Conference - MAM | |
dc.source.conferencedate | 18/03/2018 | |
dc.source.conferencelocation | Milano Italy | |
dc.identifier.url | http://mam2018.mdm.imm.cnr.it/MAM2018.pdf | |
imec.availability | Published - open access | |