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Impact of litho-patterning variations on the electrical performance and variability of advanced interconnects

dc.contributor.authorCiofi, Ivan
dc.contributor.authorRoussel, Philippe
dc.contributor.authorBaert, Rogier
dc.contributor.authorKocaay, Deniz
dc.contributor.authorContino, Antonino
dc.contributor.authorCroes, Kristof
dc.contributor.authorSaad, Yves
dc.contributor.authorGao, Weimin
dc.contributor.authorMoroz, Victor
dc.contributor.authorWilson, Chris
dc.contributor.authorMocuta, Dan
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-25T17:17:58Z
dc.date.available2021-10-25T17:17:58Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30428
dc.sourceIIOimport
dc.titleImpact of litho-patterning variations on the electrical performance and variability of advanced interconnects
dc.typeProceedings paper
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorRoussel, Philippe
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorContino, Antonino
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecRoussel, Philippe::0000-0002-0402-8225
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.beginpage18
dc.source.conference25th Lithography Workshop
dc.source.conferencedate17/06/2018
dc.source.conferencelocationSun Valley, ID USA
dc.identifier.urlhttps://www.lithoworkshop.org/assets/archive/2018/2018-Lithography-Workshop-Program-Book-v1.2.pdf
imec.availabilityPublished - imec


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