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Low frequency noise analysis of impact of metal gate Processing on the gate oxide stack quality

dc.contributor.authorClaeys, Cor
dc.contributor.authorHe, Liang
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorVeloso, Anabela
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorCollaert, Nadine
dc.contributor.authorSimoen, Eddy
dc.date.accessioned2021-10-25T17:20:33Z
dc.date.available2021-10-25T17:20:33Z
dc.date.issued2018
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30439
dc.sourceIIOimport
dc.titleLow frequency noise analysis of impact of metal gate Processing on the gate oxide stack quality
dc.typeJournal article
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpageQ26
dc.source.endpageQ32
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue3
dc.source.volume7
dc.identifier.urlhttp://jss.ecsdl.org/content/7/3/Q26.abstract
imec.availabilityPublished - open access


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