Authors

Claeys, Cor; He, Liang; O'Sullivan, Barry; Veloso, Anabela; Horiguchi, Naoto; Collaert, Nadine; Simoen, Eddy

ISSN

2162-8769

Issue

3

Journal

ECS Journal of Solid State Science and Technology

Volume

7

Title

Low frequency noise analysis of impact of metal gate Processing on the gate oxide stack quality

Publication type

Journal article

Embargo date

9999-12-31