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Articles
Low frequency noise analysis of impact of metal gate Processing on the gate oxide stack quality
Publication:
Low frequency noise analysis of impact of metal gate Processing on the gate oxide stack quality
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Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claeys, Cor
;
He, Liang
;
O'Sullivan, Barry
;
Veloso, Anabela
;
Horiguchi, Naoto
;
Collaert, Nadine
;
Simoen, Eddy
Journal
ECS Journal of Solid State Science and Technology
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1881
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Acq. date: 2025-12-12
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Metrics
Views
1881
since deposited on 2021-10-25
2
last month
Acq. date: 2025-12-12
Citations