Publication:

Low frequency noise analysis of impact of metal gate Processing on the gate oxide stack quality

Date

2018
Journal article
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dc.contributor.authorClaeys, Cor
dc.contributor.authorHe, Liang
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorVeloso, Anabela
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorCollaert, Nadine
dc.contributor.authorSimoen, Eddy
dc.contributor.imecauthorO'Sullivan, Barry
dc.contributor.imecauthorVeloso, Anabela
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecO'Sullivan, Barry::0000-0002-9036-8241
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-25T17:20:33Z
dc.date.available2021-10-25T17:20:33Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30439
dc.identifier.urlhttp://jss.ecsdl.org/content/7/3/Q26.abstract
dc.source.beginpageQ26
dc.source.endpageQ32
dc.source.issue3
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.volume7
dc.title

Low frequency noise analysis of impact of metal gate Processing on the gate oxide stack quality

dc.typeJournal article
dspace.entity.typePublication
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