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Inorganic material profiling using Arn+ cluster: Can we achieve high-quality profiles?

dc.contributor.authorConard, Thierry
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorHavelund, Rasmus
dc.contributor.authorFranquet, Alexis
dc.contributor.authorPoleunis, Claude
dc.contributor.authorDelcorte, Arnaud
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T17:23:55Z
dc.date.available2021-10-25T17:23:55Z
dc.date.issued2018-05
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30453
dc.sourceIIOimport
dc.titleInorganic material profiling using Arn+ cluster: Can we achieve high-quality profiles?
dc.typeJournal article
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.source.peerreviewyes
dc.source.beginpage633
dc.source.endpage641
dc.source.journalApplied Surface Science
dc.source.volume444
dc.identifier.urlhttps://www.sciencedirect.com/science/article/pii/S0169433218305142
imec.availabilityPublished - imec


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