Inorganic material profiling using Arn+ cluster: Can we achieve high-quality profiles?

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Authors

Conard, Thierry; Fleischmann, Claudia; Havelund, Rasmus; Franquet, Alexis; Poleunis, Claude; Delcorte, Arnaud; Vandervorst, Wilfried

ISSN

0169-4332

Journal

Applied Surface Science

Volume

444

Title

Inorganic material profiling using Arn+ cluster: Can we achieve high-quality profiles?

Publication type

Journal article

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