Inorganic material profiling using Arn+ cluster: Can we achieve high-quality profiles?

dc.contributor.author	Conard, Thierry
dc.contributor.author	Fleischmann, Claudia
dc.contributor.author	Havelund, Rasmus
dc.contributor.author	Franquet, Alexis
dc.contributor.author	Poleunis, Claude
dc.contributor.author	Delcorte, Arnaud
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.imecauthor	Conard, Thierry
dc.contributor.imecauthor	Fleischmann, Claudia
dc.contributor.imecauthor	Franquet, Alexis
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.orcidimec	Conard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimec	Fleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimec	Franquet, Alexis::0000-0002-7371-8852
dc.date.accessioned	2021-10-25T17:23:55Z
dc.date.available	2021-10-25T17:23:55Z
dc.date.issued	2018-05
dc.identifier.issn	0169-4332
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/30453
dc.identifier.url	https://www.sciencedirect.com/science/article/pii/S0169433218305142
dc.source.beginpage	633
dc.source.endpage	641
dc.source.journal	Applied Surface Science
dc.source.volume	444
dc.title	Inorganic material profiling using Arn+ cluster: Can we achieve high-quality profiles?
dc.type	Journal article
dspace.entity.type	Publication
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