Show simple item record

Interconnect metals beyond copper: reliability challenges and opportunities

dc.contributor.authorCroes, Kristof
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorWilson, Chris
dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorWu, Chen
dc.contributor.authorLesniewska, Alicja
dc.contributor.authorOprins, Herman
dc.contributor.authorBeyne, Sofie
dc.contributor.authorCiofi, Ivan
dc.contributor.authorKocaay, Deniz
dc.contributor.authorStucchi, Michele
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-25T17:29:12Z
dc.date.available2021-10-25T17:29:12Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30474
dc.sourceIIOimport
dc.titleInterconnect metals beyond copper: reliability challenges and opportunities
dc.typeProceedings paper
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorLesniewska, Alicja
dc.contributor.imecauthorOprins, Herman
dc.contributor.imecauthorBeyne, Sofie
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecLesniewska, Alicja::0000-0003-3863-065X
dc.contributor.orcidimecOprins, Herman::0000-0003-0680-4969
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.source.peerreviewyes
dc.source.beginpage111
dc.source.endpage114
dc.source.conferenceIEEE International Electron Devices Meeting - IEDM
dc.source.conferencedate1/12/2018
dc.source.conferencelocationSan Fransisco, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8614695
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record