dc.contributor.author | Crotti, Davide | |
dc.contributor.author | Swerts, Johan | |
dc.contributor.author | Yasin, Farrukh | |
dc.contributor.author | Jossart, Nico | |
dc.contributor.author | Souriau, Laurent | |
dc.contributor.author | Kundu, Shreya | |
dc.contributor.author | Urenski, Ronen | |
dc.contributor.author | Urbanowicz, Adam M. | |
dc.contributor.author | Koret, Roy | |
dc.contributor.author | Figueiro, Nivea | |
dc.contributor.author | Sendelbach, Matthew | |
dc.contributor.author | Lee, Wei Ti | |
dc.contributor.author | Shah, Kavita | |
dc.contributor.author | Larson, Tom | |
dc.contributor.author | Ger, Avron | |
dc.contributor.author | Wolfling, Shay | |
dc.contributor.author | Kar, Gouri Sankar | |
dc.date.accessioned | 2021-10-25T17:29:47Z | |
dc.date.available | 2021-10-25T17:29:47Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30476 | |
dc.source | IIOimport | |
dc.title | Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devices | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Crotti, Davide | |
dc.contributor.imecauthor | Swerts, Johan | |
dc.contributor.imecauthor | Yasin, Farrukh | |
dc.contributor.imecauthor | Jossart, Nico | |
dc.contributor.imecauthor | Souriau, Laurent | |
dc.contributor.imecauthor | Kundu, Shreya | |
dc.contributor.imecauthor | Kar, Gouri Sankar | |
dc.contributor.orcidimec | Yasin, Farrukh::0000-0002-7295-0254 | |
dc.contributor.orcidimec | Souriau, Laurent::0000-0002-5138-5938 | |
dc.source.peerreview | no | |
dc.source.conference | SPIE Advanced Lithography Conference | |
dc.source.conferencedate | 25/02/2018 | |
dc.source.conferencelocation | San Jose, CA USA | |
imec.availability | Published - imec | |