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dc.contributor.authorCuduvally, Ramya
dc.contributor.authorMorris, Richard
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorFleischmann, Claudia
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T17:30:04Z
dc.date.available2021-10-25T17:30:04Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30477
dc.sourceIIOimport
dc.titleQuantitative compositional analysis of compound semiconductors by atom probe tomography
dc.typeMeeting abstract
dc.contributor.imecauthorCuduvally, Ramya
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.source.peerreviewyes
dc.source.conferenceAtom Probe Tomography and Microscopy - APT&M
dc.source.conferencedate10/06/2018
dc.source.conferencelocationGaithersburg, MD USA
imec.availabilityPublished - imec


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