Authors

De Wolf, Ingrid; Simons, Veerle; Srinivasan, Ashwyn; Verheyen, Peter; Loo, Roger

Conference

SiGe, Ge, and Related Materials: Materials, Processing, and Devices 8

Title

Determining Si composition in SiGe alloys with <1% Si concentrations using Raman spectroscopy

Publication type

Proceedings paper

Embargo date

9999-12-31