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From fundamental insights into growth and nucleation mechanisms to area-selective deposition

dc.contributor.authorDelabie, Annelies
dc.contributor.authorSoethoudt, Job
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorBarla, Kathy
dc.contributor.authorGrillo, Fabio
dc.contributor.authorMarques, Esteban
dc.contributor.authorVan Ommen, Ruud
dc.date.accessioned2021-10-25T17:59:07Z
dc.date.available2021-10-25T17:59:07Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30585
dc.sourceIIOimport
dc.titleFrom fundamental insights into growth and nucleation mechanisms to area-selective deposition
dc.typeMeeting abstract
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorSoethoudt, Job
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorBarla, Kathy
dc.contributor.imecauthorMarques, Esteban
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewyes
dc.source.beginpageTF+AM+EM+PS-TuM1
dc.source.conferenceAVS - american vacuum society international symposium and exhibition
dc.source.conferencedate21/10/2018
dc.source.conferencelocationLong Beach, CA USA
dc.identifier.urlhttps://www2.avs.org/symposium2018/Papers/Paper_TF+AM+EM+PS-TuM10.html
imec.availabilityPublished - imec


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