dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Soethoudt, Job | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.contributor.author | Van Elshocht, Sven | |
dc.contributor.author | Barla, Kathy | |
dc.contributor.author | Grillo, Fabio | |
dc.contributor.author | Marques, Esteban | |
dc.contributor.author | Van Ommen, Ruud | |
dc.date.accessioned | 2021-10-25T17:59:07Z | |
dc.date.available | 2021-10-25T17:59:07Z | |
dc.date.issued | 2018 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30585 | |
dc.source | IIOimport | |
dc.title | From fundamental insights into growth and nucleation mechanisms to area-selective deposition | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | Soethoudt, Job | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.imecauthor | Van Elshocht, Sven | |
dc.contributor.imecauthor | Barla, Kathy | |
dc.contributor.imecauthor | Marques, Esteban | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | Van Elshocht, Sven::0000-0002-6512-1909 | |
dc.source.peerreview | yes | |
dc.source.beginpage | TF+AM+EM+PS-TuM1 | |
dc.source.conference | AVS - american vacuum society international symposium and exhibition | |
dc.source.conferencedate | 21/10/2018 | |
dc.source.conferencelocation | Long Beach, CA USA | |
dc.identifier.url | https://www2.avs.org/symposium2018/Papers/Paper_TF+AM+EM+PS-TuM10.html | |
imec.availability | Published - imec | |