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Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces

dc.contributor.authorRaineri, Vito
dc.contributor.authorPrivitera, Vittorio
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.contributor.authorSnauwaerts, Jan
dc.date.accessioned2021-09-29T12:45:47Z
dc.date.available2021-09-29T12:45:47Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/306
dc.sourceIIOimport
dc.titleCarrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.beginpage354
dc.source.endpage356
dc.source.journalAppl. Phys. Lett.
dc.source.volume64
imec.availabilityPublished - imec


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