Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces

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Authors

Raineri, Vito; Privitera, Vittorio; Vandervorst, Wilfried; Hellemans, L.; Snauwaerts, Jan

Journal

Appl. Phys. Lett.

Volume

64

Title

Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces

Publication type

Journal article

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