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Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces
Publication:
Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces
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Date
1994
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Raineri, Vito
;
Privitera, Vittorio
;
Vandervorst, Wilfried
;
Hellemans, L.
;
Snauwaerts, Jan
Journal
Appl. Phys. Lett.
Abstract
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2043
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
2043
since deposited on 2021-09-29
1
last month
Acq. date: 2025-12-10
Citations