Publication:
Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces
Date
| dc.contributor.author | Raineri, Vito | |
| dc.contributor.author | Privitera, Vittorio | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | Hellemans, L. | |
| dc.contributor.author | Snauwaerts, Jan | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-29T12:45:47Z | |
| dc.date.available | 2021-09-29T12:45:47Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/306 | |
| dc.source.beginpage | 354 | |
| dc.source.endpage | 356 | |
| dc.source.journal | Appl. Phys. Lett. | |
| dc.source.volume | 64 | |
| dc.title | Carrier Distribution in Silicon Devices by Atomic Force Microscopy on Etched Surfaces | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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