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3D imaging of atom probe tip shapes with atomic force microscopy

dc.contributor.authorFleischmann, Claudia
dc.contributor.authorParedis, Kristof
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorOp de Beeck, Jonathan
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorMorris, Richard
dc.contributor.authorCuduvally, Ramya
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T18:40:23Z
dc.date.available2021-10-25T18:40:23Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30711
dc.sourceIIOimport
dc.title3D imaging of atom probe tip shapes with atomic force microscopy
dc.typeMeeting abstract
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorOp de Beeck, Jonathan
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorMorris, Richard
dc.contributor.imecauthorCuduvally, Ramya
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.contributor.orcidimecOp de Beeck, Jonathan::0000-0003-3471-2156
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecMorris, Richard::0000-0002-0902-7088
dc.source.peerreviewyes
dc.source.conferenceAtom Probe Tomography and Microscopy - APT&M
dc.source.conferencedate10/06/2018
dc.source.conferencelocationGaithersburg, MD USA
imec.availabilityPublished - imec


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