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Electrical characterization of single nanometer-wide Si fins in dense arrays

dc.contributor.authorFolkersma, Steven
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorSchulze, Andreas
dc.contributor.authorFavia, Paola
dc.contributor.authorDirch, Petersen
dc.contributor.authorOle, Hansen
dc.contributor.authorHenrik, Henrichsen
dc.contributor.authorNielsen, Peter
dc.contributor.authorShiv, Lior
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-25T18:43:15Z
dc.date.available2021-10-25T18:43:15Z
dc.date.issued2018
dc.identifier.issn2190-4286
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30719
dc.sourceIIOimport
dc.titleElectrical characterization of single nanometer-wide Si fins in dense arrays
dc.typeJournal article
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.source.peerreviewyes
dc.source.beginpage1863
dc.source.endpage1867
dc.source.journalBeilstein Journal of Nanotechnology
dc.source.volume9
dc.identifier.urlhttps://www.beilstein-journals.org/bjnano/articles/9/178
imec.availabilityPublished - imec


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