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Real 3D depth profiling of heterogeneous microelectronic structures using a combined ToF-SIMS/in-situ SPM tool
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Authors
Franquet, Alexis
;
Spampinato, Valentina
;
Vandervorst, Wilfried
;
van der Heide, Paul
Conference
SIMS Europe 2018
Title
Real 3D depth profiling of heterogeneous microelectronic structures using a combined ToF-SIMS/in-situ SPM tool
Publication type
Oral presentation
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