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Gas Phase Pore Stuffing (GPPS)

dc.contributor.authorFujikawa, M
dc.contributor.authorYamaguchi, T
dc.contributor.authorNozawa, S
dc.contributor.authorNiino, R
dc.contributor.authorChanson, Romain
dc.contributor.authorBabaei Gavan, Khashayar
dc.contributor.authorLazzarino, Frederic
dc.contributor.authorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-25T18:48:11Z
dc.date.available2021-10-25T18:48:11Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30732
dc.sourceIIOimport
dc.titleGas Phase Pore Stuffing (GPPS)
dc.typeProceedings paper
dc.contributor.imecauthorBabaei Gavan, Khashayar
dc.contributor.imecauthorLazzarino, Frederic
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.orcidimecLazzarino, Frederic::0000-0001-7961-9727
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage10.19
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2018
dc.source.conferencelocationSanta Clara, CA USA
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8430424/
imec.availabilityPublished - open access


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