Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines

dc.contributor.author	Vandamme, Ewout
dc.contributor.author	De Wolf, Ingrid
dc.contributor.author	Lauwers, Anne
dc.contributor.author	Vandamme, Lorenz
dc.date.accessioned	2021-10-01T09:25:14Z
dc.date.available	2021-10-01T09:25:14Z
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/3073
dc.source	IIOimport
dc.title	Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines
dc.type	Proceedings paper
dc.contributor.imecauthor	De Wolf, Ingrid
dc.contributor.imecauthor	Lauwers, Anne
dc.contributor.orcidimec	De Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	925
dc.source.endpage	929
dc.source.conference	Proceedings of the 9th European Symposium on Reliability of Electron Devices and Failure Physics - ESREF
dc.source.conferencedate	5/10/1998
dc.source.conferencelocation
imec.availability	Published - open access
imec.internalnotes	Special Issue Microelectronics Reliability 38(1998)