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Low frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines

dc.contributor.authorVandamme, Ewout
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorLauwers, Anne
dc.contributor.authorVandamme, Lorenz
dc.date.accessioned2021-10-01T09:25:14Z
dc.date.available2021-10-01T09:25:14Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3073
dc.sourceIIOimport
dc.titleLow frequency noise analysis as a diagnostic tool to assess the quality of 0.25 μm Ti-silicided poly-lines
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorLauwers, Anne
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage925
dc.source.endpage929
dc.source.conferenceProceedings of the 9th European Symposium on Reliability of Electron Devices and Failure Physics - ESREF
dc.source.conferencedate5/10/1998
dc.source.conferencelocation
imec.availabilityPublished - imec
imec.internalnotesSpecial Issue Microelectronics Reliability 38(1998)


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