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Impact of controlled Ni contamination on silicon solar wafer material

dc.contributor.authorGocyla, Marcin
dc.contributor.authorHaslinger, Michael
dc.contributor.authorMertens, Paul
dc.contributor.authorJohn, Joachim
dc.date.accessioned2021-10-25T19:03:17Z
dc.date.available2021-10-25T19:03:17Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30772
dc.sourceIIOimport
dc.titleImpact of controlled Ni contamination on silicon solar wafer material
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorJohn, Joachim
dc.source.peerreviewyes
dc.source.beginpage295
dc.source.endpage299
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XIV - UCPSS
dc.source.conferencedate1/09/2018
dc.source.conferencelocationLeuven Belgium
dc.identifier.urlhttps://www.scientific.net/SSP.282.295
imec.availabilityPublished - imec
imec.internalnotesSolid State Phenomena; Vol 282


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