Authors

Groven, Benjamin; Nalin Mehta, Ankit; Bender, Hugo; Meersschaut, Johan; Conard, Thierry; Franquet, Alexis; Nuytten, Thomas; Vandervorst, Wilfried; Heyns, Marc; Caymax, Matty; Radu, Iuliana; Delabie, Annelies

Conference

18th International Conference on Atomic Layer Deposition - ALD

Title

Increased WS2 crystal grain size by controlling the nucleation behavior during plasma enhanced atomic layer deposition

Publication type

Meeting abstract