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Epitaxial growth and characterization of P-GaN gated HEMT on compliant poly-AlN substrate for e-mode power devices
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Authors
Guo, Weiming
;
Geens, Karen
;
Zhao, Ming
;
Behmenburg, Hannes
;
Fahle, Dirk
;
Odnoblyudov, Vlad
;
Basceri, Cem
;
Aktas, Ozgur
;
Decoutere, Stefaan
Conference
International Workshop on Nitride Semiconductors - IWN
Title
Epitaxial growth and characterization of P-GaN gated HEMT on compliant poly-AlN substrate for e-mode power devices
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