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High-aspect-ratio ruthenium lnes for buried power rail

dc.contributor.authorGupta, Anshul
dc.contributor.authorKundu, Shreya
dc.contributor.authorTeugels, Lieve
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorHeylen, Nancy
dc.contributor.authorJamieson, Geraldine
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorCiofi, Ivan
dc.contributor.authorChava, Bharani
dc.contributor.authorWilson, Chris
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-25T19:22:46Z
dc.date.available2021-10-25T19:22:46Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30823
dc.sourceIIOimport
dc.titleHigh-aspect-ratio ruthenium lnes for buried power rail
dc.typeProceedings paper
dc.contributor.imecauthorGupta, Anshul
dc.contributor.imecauthorKundu, Shreya
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorJamieson, Geraldine
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecJamieson, Geraldine::0000-0002-6750-097X
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage4
dc.source.endpage6
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate4/06/2018
dc.source.conferencelocationSanta Clara, CA USA
imec.availabilityPublished - open access


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