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Vapor phase thiol self-assembled monolayers for ALD blocking

dc.contributor.authorHerregods, Sebastiaan
dc.contributor.authorLecordier, Laurent
dc.contributor.authorDelande, Tinne
dc.contributor.authorTokei, Zsolt
dc.contributor.authorStruyf, Herbert
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-25T19:45:18Z
dc.date.available2021-10-25T19:45:18Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30880
dc.sourceIIOimport
dc.titleVapor phase thiol self-assembled monolayers for ALD blocking
dc.typeMeeting abstract
dc.contributor.imecauthorHerregods, Sebastiaan
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage03SALD
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM 2018
dc.source.conferencedate18/03/2018
dc.source.conferencelocationMilan Italy
dc.identifier.urlhttp://mam2018.mdm.imm.cnr.it/MAM2018.pdf
imec.availabilityPublished - open access


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