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Design, modelling, and characterization of display compatible pMUT device

dc.contributor.authorHuang, Chih Hsien
dc.contributor.authorGao, Hang
dc.contributor.authorBrondani Torri, Guilherme
dc.contributor.authorMao, Shengping
dc.contributor.authorJeong, Yongbin
dc.contributor.authorCheyns, David
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-25T20:00:08Z
dc.date.available2021-10-25T20:00:08Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30915
dc.sourceIIOimport
dc.titleDesign, modelling, and characterization of display compatible pMUT device
dc.typeProceedings paper
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorBrondani Torri, Guilherme
dc.contributor.imecauthorJeong, Yongbin
dc.contributor.imecauthorCheyns, David
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecBrondani Torri, Guilherme::0000-0002-5450-658X
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conference19th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - EurosimE
dc.source.conferencedate15/04/2018
dc.source.conferencelocationToulouse France
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8369931/
imec.availabilityPublished - open access


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