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A highly miniturized single-chip MOEMS scanner for all-in-one imaging solution

dc.contributor.authorJovic, a.
dc.contributor.authorUto, T.
dc.contributor.authorHei, Kefei
dc.contributor.authorSancho, J.
dc.contributor.authorSanchez, Nuria
dc.contributor.authorZinoviev, Kirill
dc.contributor.authorRubio, Jose L.
dc.contributor.authorMargaloo, E.
dc.contributor.authorPandraud, G.
dc.contributor.authorSarro, P.M.
dc.date.accessioned2021-10-25T20:30:52Z
dc.date.available2021-10-25T20:30:52Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30985
dc.sourceIIOimport
dc.titleA highly miniturized single-chip MOEMS scanner for all-in-one imaging solution
dc.typeProceedings paper
dc.contributor.imecauthorZinoviev, Kirill
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage25
dc.source.endpage28
dc.source.conference2018 IEEE Micro Electro Mechanical Systems (MEMS)
dc.source.conferencedate21/01/2018
dc.source.conferencelocationBelfast UK
dc.identifier.urlhttps://ieeexplore.ieee.org/document/8346472
imec.availabilityPublished - open access
imec.internalnotes


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