Backscattering/channeling study of high-dose rare-earth implants into Si

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Authors

Vantomme, Andre; Wahl, U.; Wu, Ming Fang; Hogg, S.; Pattyn, Hugo; Langouche, G.; Bender, Hugo

Journal

Nuclear Instruments and Methods. B

Volume

138

Title

Backscattering/channeling study of high-dose rare-earth implants into Si

Publication type

Journal article

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