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Backscattering/channeling study of high-dose rare-earth implants into Si
Publication:
Backscattering/channeling study of high-dose rare-earth implants into Si
Date
1998
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vantomme, Andre
;
Wahl, U.
;
Wu, Ming Fang
;
Hogg, S.
;
Pattyn, Hugo
;
Langouche, G.
;
Bender, Hugo
Journal
Nuclear Instruments and Methods. B
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2062
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations
Metrics
Views
2062
since deposited on 2021-10-01
Acq. date: 2025-10-23
Citations