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Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates

dc.contributor.authorRoca, Elisenda
dc.contributor.authorVanhellemont, Jan
dc.contributor.authorSchreutelkamp, Rob
dc.contributor.authorVermeiren, Jan
dc.date.accessioned2021-09-29T12:45:56Z
dc.date.available2021-09-29T12:45:56Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/310
dc.sourceIIOimport
dc.titleNon-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage110
dc.source.endpage113
dc.source.journalThin Solid Films
dc.source.volume240
imec.availabilityPublished - open access


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