Publication:
Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates
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2084 since deposited on 2021-09-29
4last month
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Acq. date: 2026-03-18
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Statistics
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2084 since deposited on 2021-09-29
4last month
1last week
Acq. date: 2026-03-18
Citations