Publication:
Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates
Date
| dc.contributor.author | Roca, Elisenda | |
| dc.contributor.author | Vanhellemont, Jan | |
| dc.contributor.author | Schreutelkamp, Rob | |
| dc.contributor.author | Vermeiren, Jan | |
| dc.date.accessioned | 2021-09-29T12:45:56Z | |
| dc.date.available | 2021-09-29T12:45:56Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/310 | |
| dc.source.beginpage | 110 | |
| dc.source.endpage | 113 | |
| dc.source.journal | Thin Solid Films | |
| dc.source.volume | 240 | |
| dc.title | Non-destructive thickness determination of thin cobalt and cobalt disilicide layers on silicon substrates | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |