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High sensitivity Rutherford backscattering spectrometry using multidetector digital pulse processing

dc.contributor.authorLaricchiuta, Grazia
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorZyulkov, Ivan
dc.contributor.authorArmini, Silvia
dc.contributor.authorMeersschaut, Johan
dc.date.accessioned2021-10-25T21:32:05Z
dc.date.available2021-10-25T21:32:05Z
dc.date.issued2018
dc.identifier.issn0734-2101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31119
dc.sourceIIOimport
dc.titleHigh sensitivity Rutherford backscattering spectrometry using multidetector digital pulse processing
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorZyulkov, Ivan
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewyes
dc.source.beginpage02D407
dc.source.journalJournal of Vacuum Science and Technology A
dc.source.issue2
dc.source.volume36
dc.identifier.urlhttps://avs.scitation.org/doi/abs/10.1116/1.5016033?journalCode=jva
imec.availabilityPublished - imec


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