Authors

Laricchiuta, Grazia; Vandervorst, Wilfried; Zyulkov, Ivan; Armini, Silvia; Meersschaut, Johan

ISSN

0734-2101

Issue

2

Journal

Journal of Vacuum Science and Technology A

Volume

36

Title

High sensitivity Rutherford backscattering spectrometry using multidetector digital pulse processing

Publication type

Journal article