High sensitivity Rutherford backscattering spectrometry using multidetector digital pulse processing

dc.contributor.author	Laricchiuta, Grazia
dc.contributor.author	Vandervorst, Wilfried
dc.contributor.author	Zyulkov, Ivan
dc.contributor.author	Armini, Silvia
dc.contributor.author	Meersschaut, Johan
dc.contributor.imecauthor	Vandervorst, Wilfried
dc.contributor.imecauthor	Zyulkov, Ivan
dc.contributor.imecauthor	Armini, Silvia
dc.contributor.imecauthor	Meersschaut, Johan
dc.contributor.orcidimec	Armini, Silvia::0000-0003-0578-3422
dc.contributor.orcidimec	Meersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned	2021-10-25T21:32:05Z
dc.date.available	2021-10-25T21:32:05Z
dc.date.issued	2018
dc.identifier.issn	0734-2101
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/31119
dc.identifier.url	https://avs.scitation.org/doi/abs/10.1116/1.5016033?journalCode=jva
dc.source.beginpage	02D407
dc.source.issue	2
dc.source.journal	Journal of Vacuum Science and Technology A
dc.source.volume	36
dc.title	High sensitivity Rutherford backscattering spectrometry using multidetector digital pulse processing
dc.type	Journal article
dspace.entity.type	Publication
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