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In situ gas analysis on an RTP tool with APIMS

dc.contributor.authorVereecke, Guy
dc.contributor.authorKondoh, Eiichi
dc.contributor.authorRichardson, Paul
dc.contributor.authorMaex, Karen
dc.contributor.authorHeyns, Marc
dc.contributor.authorNényei, Z.
dc.date.accessioned2021-10-01T09:35:46Z
dc.date.available2021-10-01T09:35:46Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3112
dc.sourceIIOimport
dc.titleIn situ gas analysis on an RTP tool with APIMS
dc.typeProceedings paper
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorMaex, Karen
dc.contributor.imecauthorHeyns, Marc
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage519
dc.source.endpage526
dc.source.conference44th Annual Meeting of Inst. Environmental Science and Technology
dc.source.conferencedate26/04/1998
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - open access


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