BEOL pre-metallization wet clean: post-etch residue removal and metal compatibility

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Authors
Le, Quoc Toan; Kesters, Els; Akanishi, Yuya; Iwasaki, Akihisa; Holsteyns, Frank
Conference
Surface Preparation and Cleaning Conference - SPCC
Title
BEOL pre-metallization wet clean: post-etch residue removal and metal compatibility
Publication type
Meeting abstract
Embargo date
9999-12-31
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