Evaluation of a dry laser cleaning process
dc.contributor.author | Vereecke, Guy | |
dc.contributor.author | Röhr, Erika | |
dc.contributor.author | Heyns, Marc | |
dc.date.accessioned | 2021-10-01T09:36:03Z | |
dc.date.available | 2021-10-01T09:36:03Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3113 | |
dc.source | IIOimport | |
dc.title | Evaluation of a dry laser cleaning process | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Vereecke, Guy | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 202 | |
dc.source.endpage | 209 | |
dc.source.conference | 44th Annual Meeting of Inst. Environmental Science and Technology | |
dc.source.conferencedate | 26/04/1998 | |
dc.source.conferencelocation | Phoenix, AZ USA | |
imec.availability | Published - open access |