dc.contributor.author | Lecordier, Laurent | |
dc.contributor.author | Herregods, Sebastiaan | |
dc.contributor.author | Armini, Silvia | |
dc.date.accessioned | 2021-10-25T21:42:26Z | |
dc.date.available | 2021-10-25T21:42:26Z | |
dc.date.issued | 2018 | |
dc.identifier.issn | 0734-2101 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31140 | |
dc.source | IIOimport | |
dc.title | Vapor-deposited octadecanethiol masking layer on copper to enable area selective Hf3N4 atomic layer deposition on dielectrics studied by in situ spectroscopic ellipsometry | |
dc.type | Journal article | |
dc.contributor.imecauthor | Herregods, Sebastiaan | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 31605 | |
dc.source.journal | Journal of Vacuum Science and Technology A | |
dc.source.issue | 3 | |
dc.source.volume | 36 | |
dc.identifier.url | https://avs.scitation.org/doi/full/10.1116/1.5025688 | |
imec.availability | Published - open access | |