Authors

Lecordier, Laurent; Herregods, Sebastiaan; Armini, Silvia

ISSN

0734-2101

Issue

3

Journal

Journal of Vacuum Science and Technology A

Volume

36

Title

Vapor-deposited octadecanethiol masking layer on copper to enable area selective Hf3N4 atomic layer deposition on dielectrics studied by in situ spectroscopic ellipsometry

Publication type

Journal article

Embargo date

9999-12-31