Vapor-deposited octadecanethiol masking layer on copper to enable area selective Hf3N4 atomic layer deposition on dielectrics studied by in situ spectroscopic ellipsometry

Publication:

2018

Journal article

Author(s)

;

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Journal of Vacuum Science and Technology A

1923 since deposited on 2021-10-25

1last month

Acq. date: 2026-08-08