Relation between film thickness and surface doping of MoS2 based field effect transistors

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Authors

Lockhart de la Rosa, Cesar Javier; Arutchelvan, Goutham; Leonhardt, Alessandra; Huyghebaert, Cedric; Radu, Iuliana; Heyns, Marc; De Gendt, Stefan

ISSN

2166-532X

Issue

5

Journal

APL Materials

Volume

6

Title

Relation between film thickness and surface doping of MoS2 based field effect transistors

Publication type

Journal article

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